Real-time SMART Vision System Enabler
Before
- Equipment/Process output has no Vision inspection capability
- Downstream Vision inspection detection are usually too late (many lot impacted before issue alerted the engineer)
- Often engineer/technician will analyze and perform DOE to nail down respective machine issue, causes lost of precious time
After
- Integrate AIRIS into equipment/process to enable the Vision machine capability
- Inspection criteria and limits can be teach and by recipe based
- Close loop feedback control can be achieved to STOP or trigger alarm if inspection abnormality is detected
- Improve process quality and yield, process stop when abnormality detected (real time) before impacting other lots